|
Volumn 47, Issue 4 PART 1, 2008, Pages 1952-1955
|
Regrowth of carbon nanotube array by microwave plasma-enhanced thermal chemical vapor deposition
a a a |
Author keywords
Annealing; Array; CNT; CVD; Lift off; Plasma; Raman; Regrowth; SWNT
|
Indexed keywords
AMORPHOUS CARBON;
ANNEALING;
CARBON;
CATALYSIS;
FILM GROWTH;
MICROWAVES;
NANOCOMPOSITES;
NANOSTRUCTURED MATERIALS;
NANOSTRUCTURES;
NANOTUBES;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMAS;
SILICON;
SILICON COMPOUNDS;
SINGLE-WALLED CARBON NANOTUBES (SWCN);
VAPORS;
ARRAY;
CNT;
CVD;
RAMAN;
REGROWTH;
SWNT;
CARBON NANOTUBES;
|
EID: 54249122200
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.1952 Document Type: Article |
Times cited : (13)
|
References (22)
|