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Volumn 47, Issue 4 PART 1, 2008, Pages 1952-1955

Regrowth of carbon nanotube array by microwave plasma-enhanced thermal chemical vapor deposition

Author keywords

Annealing; Array; CNT; CVD; Lift off; Plasma; Raman; Regrowth; SWNT

Indexed keywords

AMORPHOUS CARBON; ANNEALING; CARBON; CATALYSIS; FILM GROWTH; MICROWAVES; NANOCOMPOSITES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTUBES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SILICON; SILICON COMPOUNDS; SINGLE-WALLED CARBON NANOTUBES (SWCN); VAPORS;

EID: 54249122200     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.1952     Document Type: Article
Times cited : (13)

References (22)
  • 12
    • 54249158724 scopus 로고    scopus 로고
    • to be published in, Mater, DOI: 10.1016/j.diamond.2007.08.031
    • C.-C. Chiu, M. Yoshimura, and K. Ueda: to be published in Diamond Relat. Mater. [DOI: 10.1016/j.diamond.2007.08.031].
    • Diamond Relat
    • Chiu, C.-C.1    Yoshimura, M.2    Ueda, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.