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Diamond and Related Materials

Volumn 18, Issue 2-3, 2009, Pages 364-367

Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry

(4) Ohlídal, Ivan a Nečas, David a Franta, Daniel a Buršíková, Vilma a

a MASARYK UNIVERSITY (Czech Republic)

Author keywords

Diamond like carbon films; Material parameters; Optical constants; Thickness non uniformity

Indexed keywords

DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELLIPSOMETRY; OPTICAL CONSTANTS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS;

DENSITY OF DISTRIBUTIONS; DENSITY OF ELECTRONIC STATE; DIAMOND-LIKE CARBONS; DISPERSION MODELS; DLC FILMS; ELLIPSOMETRIC PARAMETERS; LOCAL FILM THICKNESS; MATERIAL PARAMETERS; MODULATED ELLIPSOMETRIES; NON-UNIFORM; OPTICAL CHARACTERIZATIONS; PARAMETRIZATION; SPECTRAL DEPENDENCES; THICKNESS NON-UNIFORMITY;

CARBON FILMS;

EID: 59649090902 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2008.09.003 Document Type: Article

Times cited : (13)

References (12)

1
- 0033167354
- Armaou A., and Christofides P.D. Chem. Eng. Sci. 54 15-16 (1999) 3305-3314
- (1999) Chem. Eng. Sci. , vol.54 , Issue.15-16 , pp. 3305-3314
- Armaou, A.¹ Christofides, P.D.²

2
- 9544257306
- González-Leal J.M., Prieto-Alcón R., Vlcek M., and Márquez E. J. Non-Cryst. Solids 345-346 (2004) 88-92
- (2004) J. Non-Cryst. Solids , vol.345-346 , pp. 88-92
- González-Leal, J.M.¹ Prieto-Alcón, R.² Vlcek, M.³ Márquez, E.⁴

3
- 33644689182
- Yin Y., Hang L., Proschek M., McKenzie D.R., and Bilek M.M.M. Surf. Coat. Technol. 200 14-15 (2006) 4339-4344
- (2006) Surf. Coat. Technol. , vol.200 , Issue.14-15 , pp. 4339-4344
- Yin, Y.¹ Hang, L.² Proschek, M.³ McKenzie, D.R.⁴ Bilek, M.M.M.⁵

4
- 9944221601
- Howling A.A., Sansonnens L., Ballutaud J., Hollenstein C., and Schmitt J.P.M. J. Appl. Phys. 96 (2004) 5429-5440
- (2004) J. Appl. Phys. , vol.96 , pp. 5429-5440
- Howling, A.A.¹ Sansonnens, L.² Ballutaud, J.³ Hollenstein, C.⁴ Schmitt, J.P.M.⁵

5
- 0036672649
- Lieberman M.A., Booth J.P., Chabert P., Rax J.M., and Turner M.M. Plasma Sources Sci. Technol. 11 3 (2002) 283-293
- (2002) Plasma Sources Sci. Technol. , vol.11 , Issue.3 , pp. 283-293
- Lieberman, M.A.¹ Booth, J.P.² Chabert, P.³ Rax, J.M.⁴ Turner, M.M.⁵

6
- 0040122424
- Zajíčková L., Buršíková V., and Franta D. Czech. J. Phys. 49 (1999) 1213-1228
- (1999) Czech. J. Phys. , vol.49 , pp. 1213-1228
- Zajíčková, L.¹ Buršíková, V.² Franta, D.³

7
- 0001852936
- Acher O., Bigan E., and Drévillon B. Rev. Sci. Instrum. 60 (1989) 65-67
- (1989) Rev. Sci. Instrum. , vol.60 , pp. 65-67
- Acher, O.¹ Bigan, E.² Drévillon, B.³

8
- 0038695308
- Wolf E. (Ed), Elsevier, Amsterdam
- Ohlídal I., and Franta D. In: Wolf E. (Ed). Ellipsometry of Thin Film Systems. Progress in Optics vol. 41 (2000), Elsevier, Amsterdam 181-282
- (2000) Progress in Optics , vol.41 , pp. 181-282
- Ohlídal, I.¹ Franta, D.²

9
- 0038580479
- Franta D., Ohlídal I., Frumar M., and Jedelský J. Appl. Surf. Sci. 212-213 (2003) 116-121
- (2003) Appl. Surf. Sci. , vol.212-213 , pp. 116-121
- Franta, D.¹ Ohlídal, I.² Frumar, M.³ Jedelský, J.⁴

10
- 0142247030
- Franta D., Ohlídal I., Buršíková V., and Zajíčková L. Diamond Relat. Mater. 12 (2003) 1532-1538
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1532-1538
- Franta, D.¹ Ohlídal, I.² Buršíková, V.³ Zajíčková, L.⁴

11
- 36749037124
- Franta D., Nečas D., and Zajíčková L. Opt. Express 15 (2007) 16230-16244
- (2007) Opt. Express , vol.15 , pp. 16230-16244
- Franta, D.¹ Nečas, D.² Zajíčková, L.³

12
- 0000096595
- Herzinger C.M., Johs B., McGahan W.A., Woollam J.A., and Paulson W. J. Appl. Phys. 83 (1998) 3323-3336
- (1998) J. Appl. Phys. , vol.83 , pp. 3323-3336
- Herzinger, C.M.¹ Johs, B.² McGahan, W.A.³ Woollam, J.A.⁴ Paulson, W.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.