Micromachined quartz resonator based infrared detector array

Sensors and Actuators, A: Physical

Volumn 149, Issue 2, 2009, Pages 189-192

  Kao, Ping ^a   Tadigadapa, Srinivas ^a,b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Micromachining quartz; Quartz resonators; Thermal infrared detectors; Y cut quartz

Indexed keywords

COMPOSITE MICROMECHANICS; CRYSTAL RESONATORS; DETECTORS; HEATING; INFRARED DETECTORS; MACHINING; MICROMACHINING; OXIDE MINERALS; RESONATORS; TIME MEASUREMENT; YTTRIUM ALLOYS;

CALIBRATION TESTS; DETECTOR ARRAYS; INFRARED THERMAL DETECTORS; INVERTED MESAS; MEASUREMENT TIME; MICROMACHINED; MICROMACHINING QUARTZ; QUARTZ RESONATORS; QUARTZ SUBSTRATES; RESONANCE CHARACTERISTICS; RESONATOR ARRAYS; RESPONSE TIME MEASUREMENTS; RESPONSIVITY; ROOM TEMPERATURES; STATE-OF-THE ARTS; TEMPERATURE SENSITIVITIES; THERMAL IMAGING APPLICATIONS; THERMAL INFRARED DETECTORS; Y-CUT QUARTZ;

QUARTZ;

EID: 58949094486     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.11.013     Document Type: Article

References (24)

1. Eernisse E.P., Ward R.W., and Wiggins R.B. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 35 (1988) 323-330
2. Ralph J.E., King R.C., Curran J.E., and Page J.C. Miniature quartz resonator thermal detector. IEEE Ultrasonics Symposium, vol. 1 (1985) 362-364
3. Hamrour M.R., Galliou S., and Dulmet B. Sensors and Actuators A: Physical 65 (1998) 147
4. Kruse P.W. Uncooled IR focal plane arrays. Infrared Technology XXI, vol. 2552. SPIE, San Diego, CA, USA (1995) 556
5. Tadigadapa S., and Zhang Y. Thermal sensors from micro and nanoscale structures. In: Craig Grimes E.D., and Michael Pishko (Eds). Encyclopedia of Sensors (2006), American Scientific Publisher
6. Rogalski A. Progress in Quantum Electronics 27 (2003) 59
7. Wood R.A. Uncooled microbolometer infrared sensor arrays. In: Capper P., and Elliott C.T. (Eds). Infrared Detectors and Emitters: Materials and Devices vol. 8 (2001), Kluwer Academic Publisher, Boston 149-175
8. Radford W.R., Wyles W., Varesi J., Ray J., Murphy M., Kennedy D., Finch A., Moody E., Cheung F., Coda R., and Baur S. Proceedings of the SPIE 3436 (1998) 636-646
9. Tezcan D.S., Eminoglu S., Sevket Akar O., and Akin T. A low cost uncooled infrared microbolometer focal plane array using the CMOS n-well layer. Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems, 21-25 January. 2001. IEEE, Interlaken, Switzerland (2001) 566-569
10. Sedky S., Fiorini P., Caymax M., Baert C., Hermans L., and Mertens R. IEEE Electron Device Letters 19 (1998) 376
11. Belcher J.F., Hanson C.M., Beratan H.R., Udayakumar K.R., and Soch K.L. Uncooled monolithic ferroelectric IRFPA technology. Proceedings of the 1998 Conference on Infrared Technology and Applications XXIV Part 2 (of 2). July 19-24 1998, vol 3436, Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, USA, San Diego, CA, USA (1998) 611-612
12. Hanson C.M., Beratan H.R., and Belcher J.F.S. Proceedings of the SPIE - The International Society for Optical Engineering Photodetectors: Materials and Devices VI, vol. 4288, 22-24 January 2001 (2001) 298-303
13. Datskos P.G., Lavrik N.V., and Rajic S. Review of Scientific Instruments 75 (2004) 1134-1148
14. Tsow F., and Tao N. Applied Physics Letters 90 (2007) 174102-174103
15. Hamrour M.R., and Galliou S. Analysis of the infrared sensitivity of a quartz resonator application as a thermal sensor. IEEE Ultrasonics Symposium, vol. 1 (1994) 513-516 (vol. 511)
16. Vig J.R., Filler R.L., and Kim Y.K. Microresonator sensor arrays. 49th IEEE International Frequency Control Symposium (1995) 852
17. Vig J.R., Filler R.L., and Kim Y. Journal of Microelectromechanical Systems 5 (1996) 131-137
18. Kim Y., and Vig J.R. Experimental results on a quartz microresonator IR sensor. Ultrasonics Symposium, 1997. Proceedings, 1997 IEEE, vol. 1 (1997) 449
19. Kao P., Patwardhan A., Allara D., and Tadigadapa S. Anal. Chem. (2008)
20. Boston Piezo Optics Inc., MA, USA.
21. Goyal A., Hood V., and Tadigadapa S. Journal of Non-Crystalline Solids 352 (2006) 657
22. Li L., Abe T., and Esashi M. Sensors and Actuators A (Physical) A114 (2004) 496
23. Rosenbaum J.F. Bulk Acoustic Wave Theory and Devices (1988), Artech House, Boston
24. Park J.I., Park C.H., and Yu I. Journal of the Korean Physical Society 32 (1998) S1254-S1256