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Volumn , Issue , 1995, Pages 130-133
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Role of minienvironments in redefining microelectronic manufacturing economics
a
a
Asyst Technologies
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(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACCIDENT PREVENTION;
CLEAN ROOMS;
CONTAMINATION;
COSTS;
ENVIRONMENTAL ENGINEERING;
FACTORY AUTOMATION;
HEALTH RISKS;
MATERIALS HANDLING;
SILICON WAFERS;
MINIENVIRONMENTS;
STANDARD MECHANICAL INTERFACE SYSTEM;
WAFER HANDLING;
WAFER ISOLATION TECHNOLOGY;
MICROELECTRONIC PROCESSING;
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EID: 0029529387
PISSN: 00739227
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (0)
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