Surface micromachined on-chip transformer fabricated on glass substrate

Microsystem Technologies

Volumn 15, Issue 4, 2009, Pages 547-552

  Yunas, Jumril ^a   Hamzah, Azrul Azlan ^a   Majlis, Burhanuddin Yeop ^a  

^a UNIVERSITI KEBANGSAAN MALAYSIA   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROMACHINING; SURFACE MICROMACHINING; THREE DIMENSIONAL;

COIL STRUCTURES; GLASS SUBSTRATES; LOW AND HIGH FREQUENCIES; MICRO TRANSFORMERS; MICROMACHINED; MICROMACHINING TECHNIQUES; ON CHIPS; ON-CHIP TRANSFORMERS; RF PERFORMANCE; RF-MEMS; SI-BASED; SILICON-BASED; SPIRAL COILS;

GLASS;

EID: 58849145542     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0704-2     Document Type: Article

References (14)

1. KI Arshak 1999 Development of high frequency coreless transformer using thick film polymer technology Microelectron J 30 119 125 10.1016/S0026-2692(98) 00098-6
2. K Chong YH Xie 2005 High performance on-chip transformers IEEE Electron Device Lett 26 8 557 559 10.1109/LED.2005.851817
3. HS Dalmia F Ayazi M Swaminathan SH Min SH Lee W Kim 2002 Design of inductors in organic substrates for 1-3 GHz wireless application IEEE MTT-S Int Microw Symp Dig 3 1405 1408
4. H Jiang Y Wang NC Tien 2000 On-Chip Spiral Inductors suspended over deep copper-line cavities IEEE Trans Microw Theory 48 12 2415 2423 10.1109/22.898992
5. H Jiang K Yoo JA Yeh Z Li 2002 Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate J Micromech Microeng 12 87 95 10.1088/0960-1317/12/1/314
6. KI Jolic MK Ghantasala MK Hayes H Jin 2003 Fabrication of three dimensional inductor coil using eximer laser micromachining J Micromech Microeng 13 782 789 10.1088/0960-1317/13/5/334
7. K Kawabe 1984 Planar inductor IEEE Trans Magn MAG-20 5
8. KT Ng B Rejae JN Burghartz 2002 Substrate effects in monolithic RF transformer on silicon IEEE Trans Microw Theory Tech 50 1 377 383 10.1109/22.981289
9. JY Park JU Bu 2003 Packaging compatible microtransformers on a silicon substrate IEEE Trans Adv Packag 26 2 160 164 10.1109/TADVP.2003.817341
10. RP Ribas J Lescot F Ndagijimana 2000 Micromachined microwave planar spiral inductors and transformers IEEE Trans Microw Theory Tech 48 8 1326 1335 10.1109/22.859477
11. YH Wu KH Shih CC Wu CP Liao SC Pai CC Chi 2000 Fabrication of very high resistivity Si with low loss and cross talk IEEE Electron Device Lett 21 9 442 444 10.1109/55.863105
12. Yoon JB, Han C, Yoon E, Kim C (1999) Monolithic high Q overhang inductors fabricated on silicon and glass substrate. Electron Device Meeting. IEDM International technical digest, pp 753-756
13. CP Yue SS Wong 1998 On-chip spiral inductors with pattern ground shields for Si-based RFIC's IEEE J Solid-State Circuits 13 1743 1752
14. Yunas J, Majlis BY (2008) Comparative study of stack interwinding micro-transformers on silicon monolithic. Microelectron J (in press). doi: 10.1016/j.mejo.2008.02.026