Effect of the C2H2 and N2 flow rate on nanocomposite nc-ZrCN/a-C:H(N) film synthesized by filtered cathodic vacuum arc technique

Surface Review and Letters

Volumn 15, Issue 6, 2008, Pages 781-786

  Zhou, Kui ^a   Wu, Xianying ^a   Zhang, Xu ^a   Qin, Lizhao ^a   Liao, Bin ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

Author keywords

Filtered cathodic vacuum arc technique; Flow rate; Nanocomposite nc ZrCN a C:H(N)

Indexed keywords

AMORPHOUS FILMS; CAVITY RESONATORS; FLOW RATE; MECHANICAL PROPERTIES; NANOCOMPOSITES; PHOTOELECTRON SPECTROSCOPY; STRESSES; VACUUM; VACUUM APPLICATIONS; VACUUM TECHNOLOGY; X RAY ANALYSIS; ZIRCONIUM; ZIRCONIUM COMPOUNDS;

FILTERED CATHODIC VACUUM ARC TECHNIQUE; INTERNAL STRESSES; NANOCOMPOSITE NC-ZRCN/A-C:H(N); SURFACE PROFILERS; X RAY DIFFRACTION (XRD); X RAY PHOTOELECTRON SPECTROSCOPY (XPS); XPS SPECTRUM; XRD PATTERNS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 58449108277     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X08012207     Document Type: Article

References (22)

1. K.-T. Rie, A. Gebauer and J. Wohle, Surf. Coat. Technol. 86/87 (1996) 498.
2. W. C. Russell and C. Strandberg, Int. J. Refract. Metals Hard Mater. 14(1-3) (1996) 51-58.
3. S. H. Yao, Y. L. Su, W. H. Kao and K. W. Cheng, Mater. Lett. 59 (2005) 3230-3233.
4. S. Veprek, S. Reiprich and L. Shizhi, Appl. Phys. Lett. 66 (1995) 2640.
5. G. Gassner, P. H. Mayrhofer, J. Patscheider and C. Mitterer, Thin Solid Films 515 (2007) 5411-5417.
6. S. Veprek, A. Niederhofer, K. Moto and T. Bolom, et al., Surf. Coat. Technol. 133-134 (2000) 152-159.
7. A. A. Voevndin and J. S. Abinski, Superhard Diamond Related Mater. 7 (1998) 463.
8. S. Veprek and A. S. Argon, 146-147 (2001) 175-182.
9. A. A. Voevodin, S. V. Prasad and J. S. Zabinski, J. Appl. Phys. 82 (1997) 855.
10. D. Klaffke and A. Skopp, Surf. Coat. Technol. 98 (1998) 953.
11. J. Patscheider, T. Zehnder and M. Diserens, Surf. Coat. Technol. 146-147 (2001) 201.
12. T. Zhang, Z. M. Zeng, X. B. Tian, B. Y. Tang and P. K. Chu, J. Vac. Sci. Technol. A 175 (1999) 3074.
13. E. Lewin, B. Persson, M. Lattemann et at., Surf. Coat. Technol. 202 (2008) 3563-3570.
14. M. Matsuoka, S. Isotani, W. Sucasaire et at.. Surf. Coat. Technol. 202 (2008) 3129-3135.
15. J. Jiang, W. Cheng, Y. Zhang et al., Mater. Lett. 61 (2007) 2243-2246
16. A. P. Dementjev, A. de Graaf, M. C. M. van de Sanden et al., Diamond Related Mater. 9 (2000) 1904-1907.
17. P. Prieto, L. Galán and J. M. Sanz, Surf. Interface Anal. 21 (1994) 395.
18. Y. Zhou, N. Kojima, H. Sugiyama et al., Appl. Surf. Sci. (2008) APSUSC-16617.
19. K. I. Schiffmann, M. Fryda, G. Goerigk et al., Thin Solid Films 347 (1999) 60.
20. C. Corbella, M. Vives, A. Pinyol, E. Bertran et al., Surf. Coat. Technol. 177-178 (2004) 409-414.
21. A. C. Ferrari, B. Kleinsorge, N. A. Morrison, A. Hart, V. Stolojan and J. Robertson, J. Appl. Phys. 85(10) (1999) 7191.
22. J. P. Sullivan, T. A. Friedmann and A. G. Baca, J. Electron. Mater. 26Z (1998) 1021.