Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 409-414

  Corbella, C ^a   Vives, M ^a   Pinyol, A ^a   Bertran, E ^a   Canal, C ^b   Polo, M C ^a   Andujar J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b Depto de Tecn de Tensioactivos I   (Spain)

Author keywords

Carbon; Metal containing carbon; Photoelectron spectroscopy; Reactive sputtering; X ray diffraction

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBIDES; COMPOSITION; ENERGY GAP; HYDROGENATION; OPTICAL FILMS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

BAND GAP;

PROTECTIVE COATINGS;

COATING;

EID: 1342268139     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.09.017     Document Type: Article

References (24)

1. Robertson J. Mater. Sci. Eng. R 37 2002 129
2. M. Grischke, R. Herb, O. Massler, J. Karner, H. Eberle, High vacuum based deposition of carbon-based films for industrial applications, Proc. 44th Technical Conference of Soc. Vac. Coaters, Albuquerque, NM (2001) 407
3. Grill A. Meyerson B. Patel V. J. Mater. Res. 3 1988 214
4. Pino F.J. Bertran E. Polo M.C. Andújar J.L. Diamond Relat. Mater. 10 2001 952
5. Zabinski J.S. Voevodin A.A. J. Vac. Sci. Technol. A 16 1998 1890
6. C. Strondl, G.J. van der Kolk, T. Hurkmans, W. Fleischer, N.M. Carvalho, J.T.M. de Hosson, Mechanical and tribological properties of metal containing diamond-like carbon coatings (Me-DLC) deposited under different plasma confinement conditions, Proc 44th Technical Conference of Soc. Vac. Coaters, Albuquerque, NM (2001) 67
7. Huang Q.F. Yoon S.F. Rusli Yang H. Gan B. Chew K. Ahn J. J. Appl. Phys. 7 2000 4191
8. Harry E. Pauleau Y. Adamik M. Barna P.B. Sulyok A. Menyhard M. Surf. Coat. Technol. 100 1998 291
9. Zeng X.T. J. Vac. Sci. Technol. A 17 1999 1991
10. Hsieh W.P. Wang D.Y. Shieu F.S. J. Vac. Sci. Technol. A 17 1999 1053
11. Kulikovsky V.Y. Fendrych F. Jastrabik L. Chvostova D. Soukup L. Pridal J., et-al. Surf. Coat. Technol. 102 1998 81
12. Yang S. Li X. Renevier N.M. Teer D.G. Surf. Coat. Technol. 142 2001 85
13. Rack P.D. Peterson J.J. Li J. Geiculescu A.C. Rack H.J. J. Vac. Sci. Technol. A 19 2001 62
14. Bewilogua K. Cooper C.V. Specht C. Schröder J. Wittorf R. Grischke M. Surf. Coat. Technol. 132 2000 275
15. Wei Q. Narayan R.J. Sharma A.K. Sankar J. Narayan J. J. Vac. Sci. Technol. A 17 1999 3406
16. Wang D.-Y. Chang C.-L. Ho W.-Y. Thin Solid Films 355 1999 246
17. Chen J.S. Lau S.P. Chen G.Y. Sun Z. Li Y.J. Tay B.K., et-al. Diamond Relat. Mater. 10 2001 2018
18. Meng W.J. Gillispie B.A. J. Appl. Phys. 84 1998 4314
19. Schiffmann K.I. Fryda M. Goerigk G. Lauer R. Hinze P. Bulack A. Thin Solid Films 347 1999 60
20. Pauleau Y. Vacuum 61 2001 175
21. Li G. Zhao Y. Pang S.-S. Mater. Sci. Eng. A A271 1999 43
22. Zhang P. Tay B.K. Sun C.Q. Lau S.P. J. Vac. Sci. Technol. A A20 4 2002 1390
23. Peng X.L. Barber Z.H. Clyne T.W. Surf. Coat. Technol. 138 2001 23
24. Chen J.S. Lau S.P. Sun Z. Chen G.Y. Li Y.J. Tay B.K., et-al. Thin Solid Films 398-399 2001 110