Abnormally high local electrical fluctuations in heavily pocket-implanted bulk long MOSFET

Solid-State Electronics

Volumn 53, Issue 2, 2009, Pages 127-133

  Cathignol, Augustin ^a,b   Bordez, Samuel ^a   Cros, Antoine ^a   Rochereau, Krysten ^c   Ghibaudo, Gérard ^b  

^a STMICROELECTRONICS   (France)

^b IMEP LAHC   (France)

^c NXP SEMICONDUCTORS   (France)

Author keywords

Extraction; Fluctuations; Halos; Matching; Mismatch; Mobility; Pockets; Variability

Indexed keywords

DEGRADATION; MOSFET DEVICES; THICKNESS MEASUREMENT;

FLUCTUATIONS; HALOS; MATCHING; MISMATCH; MOBILITY; POCKETS; VARIABILITY;

DRAIN CURRENT;

EID: 58349102505     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2008.09.017     Document Type: Article

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