|
Volumn 389-390, Issue , 2009, Pages 144-150
|
Coolant effects on tool wear in machining single-crystal silicon with diamond tools
|
Author keywords
Coolant; Diamond turning; Ductile cutting; Infrared lens; Single crystal silicon; Tool wear
|
Indexed keywords
COOLANTS;
CRYSTAL CUTTING;
DIAMONDS;
MONOCRYSTALLINE SILICON;
SILICON WAFERS;
SINGLE CRYSTALS;
TURNING;
WEAR OF MATERIALS;
DIAMOND TURNING;
DUCTILE CUTTING;
INFRARED LENS;
SINGLE CRYSTAL SILICON;
TOOL WEAR;
DIAMOND CUTTING TOOLS;
|
EID: 58149502792
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: None Document Type: Article |
Times cited : (12)
|
References (14)
|