Performance of single crystal diamond tools in ductile mode cutting of silicon

Journal of Materials Processing Technology

Volumn 185, Issue 1-3, 2007, Pages 24-30

  Uddin, M Sharif ^a   Seah, K H W ^a   Rahman, M ^a   Li, X P ^a   Liu, K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Crystal orientation; Ductile mode cutting; Silicon; Single crystal diamond; Tool wear

Indexed keywords

CRYSTAL ORIENTATION; DUCTILITY; SILICON WAFERS; SINGLE CRYSTALS; WEAR OF MATERIALS; WEAR RESISTANCE;

ABRASIVE WEAR; DUCTILE MODE CUTTING; SINGLE CRYSTAL DIAMOND; TOOL WEAR;

DIAMOND CUTTING TOOLS;

EID: 33847142705     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2006.03.138     Document Type: Article

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