Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon

Wear

Volumn 255, Issue 7-12, 2003, Pages 1380-1387

  Yan, Jiwang ^a   Syoji, Katsuo ^b   Tamaki, Jun'ichi ^a  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond turning; Ductile regime machining; Single crystal silicon; Tool wear; Ultra precision cutting

Indexed keywords

DIAMOND CUTTING TOOLS; DUCTILITY; SCANNING ELECTRON MICROSCOPY; SILICON; SINGLE CRYSTALS;

TOOL WEAR;

WEAR OF MATERIALS;

CUTTING TOOL; DIAMOND TOOL; SILICON; TOOL WEAR;

EID: 0043065480     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00076-0     Document Type: Article

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