A novel self-heating paraffin membrane micro-actuator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 531-534

  Goldschmidtboing F ^a   Katus, P ^a   Geipel, A ^a   Woias, P ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; HEATING; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PARAFFIN WAXES; PARAFFINS; REACTIVE ION ETCHING; STANDARDS;

ACTUATOR DESIGN; FABRICATION PROCESSES; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NOVEL FABRICATION PROCESS; PHASE CHANGES; REACTION TIME; SELF-HEATING; SURROUNDING STRUCTURES;

ACTUATORS;

EID: 50149111132     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443710     Document Type: Conference Paper

References (4)

1. E.T. Carlen, C.H. Mastrangelo, J of MEMS, Vol 11, No 5, 2002, 408-420
2. L. Klintberg et al, Sens. and Act. A 96, 2002, 189-195
3. R. Bodén et al., Sensors and Actuators A, Vol. 127, Iss. 1, 2006, pp. 88-93.
4. R. Bodén et al., Transducers '07, Digest of Techn. Papers, Vol. 2, 2007, pp. 2429-2432.