An easy fabrication technique for micro paraffin actuator and application to microvalve

Proceedings - Electrochemical Society

Volumn 9, Issue , 2004, Pages 330-335

  Kobayashi, Takeshi ^a   Matsuoka, Satoshi ^b   Ueno, Akira ^b   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOTO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC POTENTIAL; FABRICATION; FLUIDICS; POLYCARBONATES; POLYIMIDES;

ACTUATION MATERIALS; MICRO PARAFFIN ACTUATORS; MICROFLUIDIC DEVICES; MICROREACTORS;

ACTUATORS;

EID: 17044415703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. N-T Nguyen and S.T. Wereley, Fundamentals and Applications of Microfluidics, p. 272, Artech House Publishers, Boston, London (2002).
2. S. Shoji and M. Esashi, J. Micromech. Microeng., 4, 157 (1994).
3. E.T. Carlen and C.H. Mastrangelo, J. Microelectromech. Syst., 11, 408 (2002).
4. L. Klintberg, M. Karlsson, L. Stenmark, and G. Thornell, Sensors and Actuators A, 105, 237 (2003).