One-step non-contact patterns transferring by plasma based ion implantation

Journal of Physics D: Applied Physics

Volumn 41, Issue 22, 2008, Pages

  Kwok, Dixon T K ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; ION IMPLANTATION; PLASMA APPLICATIONS; PLASMAS; SUBSTRATES;

IDENTICAL IMAGES; ION FOCUSING; LENS SYSTEMS; LINE WIDTHS; METAL MASKS; NON CONTACTS; PARTICLE IN CELLS; PLASMA BASED ION IMPLANTATIONS; PLASMA IMMERSION ION IMPLANTATIONS;

IONS;

EID: 58149296323     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/22/225501     Document Type: Article

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