Langmuir probe study of a titanium pulsed filtered cathodic arc discharge

Plasma Sources Science and Technology

Volumn 15, Issue 3, 2006, Pages 533-537

  Andruczyk, D ^a   Tarrant, R N ^a   James, B W ^a   Bilek, M M M ^a   Warr, G B ^a,b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CATHODES; ELECTRON ENERGY ANALYZERS; MAGNETIC FILTERS; SUBSTRATES; TITANIUM;

CATHODIC ARC DISCHARGE; ELECTRON ENERGY DISTRIBUTION; ION DENSITY; LANGMUIR PROBE; PLASMA PARAMETERS;

PLASMAS;

EID: 33745625410     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/3/032     Document Type: Article

References (7)

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7. Tarrant R N, Bilek M M M, Oates T W H, Pigott J and McKenzie D R 2002 Surf. Coat. Technol. 156 110-4