Sub-ppm detection of vapors using piezoresistive microcantilever array sensors

Nanotechnology

Volumn 20, Issue 1, 2009, Pages

  Yoshikawa, Genki ^a,b,d   Lang, Hans Peter ^a   Akiyama, Terunobu ^c   Aeschimann, Laure ^c   Staufer, Urs ^c   Vettiger, Peter ^c   Aono, Masakazu ^d   Sakurai, Toshio ^b   Gerber, Christoph ^a,d  

^a UNIVERSITY OF BASEL   (Switzerland)

^b TOHOKU UNIVERSITY   (Japan)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^d NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; HYDROCARBONS; HYDROSTATIC PRESSURE; NANOCANTILEVERS; ORGANIC COMPOUNDS; PARAFFINS; PRINCIPAL COMPONENT ANALYSIS; SENSORS; VAPOR PRESSURE; VOLATILE ORGANIC COMPOUNDS;

ANALYTES; EVAPORATION MODELS; HOMOLOGOUS SERIES; LANGMUIR; LOW VAPOR PRESSURES; N PENTANES; N-DODECANE; PIEZORESISTIVE CANTILEVER ARRAYS; PIEZORESISTIVE MICROCANTILEVER; PRINCIPAL COMPONENTS; QUANTITATIVE MODELS; SATURATED VAPORS; TETRADECANE;

VAPORS;

ALKANE; DODECANE; PENTANE; TETRADECANE; TRIDECANE; VOLATILE ORGANIC COMPOUND;

ARTICLE; NANOARRAY; NANOSENSOR; PIEZOELECTRICITY; PRINCIPAL COMPONENT ANALYSIS; PRIORITY JOURNAL; QUANTITATIVE ANALYSIS; SENSITIVITY ANALYSIS; STATISTICAL MODEL; VAPOR PRESSURE;

EID: 58149265152     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/1/015501     Document Type: Article

References (19)

1. Berger R, Delamarche E, Lang H P, Gerber C, Gimzewski J K, Meyer E and Güntherodt H-J 1997 Surface stress in the self-assembly of alkanethiols on gold Science 276 2021-4
2. Baller M K et al 2000 A cantilever array-based artificial nose Ultramicroscopy 82 1-9
3. Fritz J, Baller M K, Lang H P, Rothuizen H, Vettiger P, Meyer E, Güntherodt H-J, Gerber C and Gimzewski J K 2000 Translating biomolecular recognition into nanomechanics Science 288 316-8
4. Backmann N, Zahnd C, Huber F, Bietsch A, Pluckthun A, Lang H P, Güntherodt H-J, Hegner M and Gerber C 2005 A label-free immunosensor array using single-chain antibody fragments Proc. Natl Acad. Sci. USA 102 14587-92
5. Zhang J, Lang H P, Huber F, Bietsch A, Grange W, Certa U, McKendry R, Güntherodt H-J, Hegner M and Gerber C 2006 Rapid and label-free nanomechanical detection of biomarker transcripts in human RNA Nat. Nanotechnol. 1 214-20
6. Nugaeva N, Gfeller K Y, Backmann N, Duggelin M, Lang H P, Güntherodt H-J and Hegner M 2007 An antibody-sensitized microfabricated cantilever for the growth detection of Aspergillus niger spores Microsci. Microanal. 13 13-7
7. Watari M, Galbraith J, Lang H P, Sousa M, Hegner M, Gerber C, Horton M A and McKendry R A 2007 Investigating the molecular mechanisms of in-plane mechanochemistry on cantilever arrays J. Am. Chem. Soc. 129 601-9
8. Jensenius H, Thaysen J, Rasmussen A A, Veje L H, Hansen O and Boisen A 2000 A microcantilever-based alcohol vapor sensor-application and response model Appl. Phys. Lett. 76 2615-7
9. Lange D, Hagleitner C, Hierlemann A, Brand O and Baltes H 2002 Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds Anal. Chem. 74 3084-95
10. Aeschimann L, Meister A, Akiyama T, Chui B W, Niedermann P, Heinzelmann H, De Rooij N F, Staufer U and Vettiger P 2006 Scanning probe arrays for life sciences and nanobiology applications Microelectron. Eng. 83 1698-701
11. Aeschimann L et al 2007 Piezoresistive scanning probe arrays for operation in liquids J. Phys.: Conf. Ser. 61 6-10
12. Polesel-Maris J et al 2007 Piezoresistive cantilever array for life sciences applications J. Phys.: Conf. Ser. 61 955-9
13. Lutwyche M et al 1999 5X5 2D AFM cantilever arrays a first step towards a terabit storage device Sensors Actuators A 73 89-94
14. Vancura C, Ruegg M, Li Y, Hagleitner C and Hierlemann A 2005 Magnetically actuated complementary metal oxide semiconductor resonant cantilever gas sensor systems Anal. Chem. 77 2690-9
15. Fadel L, Lochon F, Dufour I and Francais O 2004 Chemical sensing: millimeter size resonant microcantilever performance J. Micromech. Microeng. 14 S23-30
16. Hierlemann A, Lange D, Hagleitner C, Kerness N, Koll A, Brand O and Baltes H 2000 Application-specific sensor systems based on CMOS chemical microsensors Sensors Actuators B 70 2-11
17. Langmuir I 1918 The evaporation of small spheres Phys. Rev. 12 368-70
18. Lochon F, Fadel L, Dufour I, Rebiere D and Pistre J 2006 Silicon made resonant microcantilever: dependence of the chemical sensing performances on the sensitive coating thickness Mater. Sci. Eng. C 26 348-53
19. Then D, Vidic A and Ziegler C 2006 A highly sensitive self-oscillating cantilever array for the quantitative and qualitative analysis of organic vapor mixtures Sensors Actuators B 117 1-9