Recognizing yield patterns through hybrid applications of machine learning techniques

Information Sciences

Volumn 179, Issue 6, 2009, Pages 844-850

  Lee, Jang Hee ^a   Ha, Sung Ho ^b  

^a Korea University of Technology and Education   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Case based reasoning; Feature weighting; Hybrid application; Machine learning; Semiconductor manufacturing; Yield management

Indexed keywords

APPLICATIONS; CASE BASED REASONING; EDUCATION; ELECTRIC CONDUCTIVITY; HYBRID SENSORS; LEARNING ALGORITHMS; LEARNING SYSTEMS; ROBOT LEARNING; SEMICONDUCTOR MATERIALS;

FEATURE WEIGHTING; HYBRID APPLICATION; MACHINE LEARNING; SEMICONDUCTOR MANUFACTURING; YIELD MANAGEMENT;

MANUFACTURE;

EID: 58049125538     PISSN: 00200255     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ins.2008.11.008     Document Type: Article

References (42)

1. H. Ahn, K.-J. Kim, Global optimization of case-based reasoning for breast cytology diagnosis, Expert Systems with Applications, Available online 17 November, 2007.
2. Ahn H., Kim K., and Han I. Global optimization of feature weights and the number of neighbors that combine in a case-based reasoning system. Expert Systems 23 (2006) 290-301
3. Burnham K.P., and Anderson D.R. Model Selection and Multimodel Inference: A Practical-Theoretic Approach. second ed. (2002), Springer-Verlag
4. Chang P.-C., and Lai C.-Y. A hybrid system combining self-organizing maps with case-based reasoning in wholesaler's new-release book forecasting. Expert Systems with Applications 29 (2005) 183-192
5. Chang P.-C., Lai C.-Y., and Lai K.R. A hybrid system by evolving case-based reasoning with genetic algorithm in wholesaler's returning book forecasting. Decision Support Systems 42 (2006) 1715-1729
6. Chaudhry N., Moyne J., and Rundensteiner E.A. An extended database design methodology for uncertain data management. Information Sciences 121 (1999) 83-112
7. Chen J.-H., and Hsu S.C. Hybrid ANN-CBR model for disputed change orders in construction projects. Automation in Construction 17 (2007) 56-64
8. Chien C.-F., Wang W.-C., and Cheng J.-C. Data mining for yield enhancement in semiconductor manufacturing and an empirical study. Expert Systems with Applications 33 (2007) 192-198
9. Cho C., Kim D.D., Kim J., Plouchart J.-O., Lim D., Cho S., and Trzcinski R. Decomposition and analysis of process variability using constrained principal component analysis. IEEE Transactions on Semiconductor Manufacturing 21 (2008) 55-62
10. Choy K.L., Lee W.B., and Lo V. Design of an intelligent supplier relationship management system: a hybrid case based neural network approach. Expert Systems with Applications 24 (2003) 225-237
11. Chun S.-H., and Park Y.-J. A new hybrid data mining technique using a regression case based reasoning: application to financial forecasting. Expert Systems with Applications 31 (2006) 329-336
12. Guiu J.M.G., Ribé E.G., Mansilla E.B., and Fàbrega X.L. Automatic diagnosis with genetic algorithms and case-based reasoning. Artificial Intelligence in Engineering 13 (1999) 367-372
13. Hsu S.-C., and Chien C.-F. Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing. International Journal of Production Economics 107 (2007) 88-103
14. Hsu C.-C., and Ho C.-S. A new hybrid case-based architecture for medical diagnosis. Information Sciences 166 (2004) 231-247
15. Hui S.C., Fong A.C.M., and Jha G. A web-based intelligent fault diagnosis system for customer service support. Engineering Applications of Artificial Intelligence 14 (2001) 537-548
16. Hui S.C., and Jha G. Data mining for customer service support. Information and Management 38 (2000) 1-13
17. Im K.H., and Park S.C. Case-based reasoning and neural network based expert system for personalization. Expert Systems with Applications 32 (2007) 77-85
18. Kaempf U. The binomial test: a simple tool to identify process problems. IEEE Transactions on Semiconductor Manufacturing 8 (1995) 160-166
19. Kang B.-S., Lee J.-H., Shin C.-K., Yu S.-J., and Park S.-C. Hybrid machine learning system for integrated yield management in semiconductor manufacturing. Expert Systems with Applications 15 (1998) 123-132
20. Kim K.-S., and Han I. The cluster-indexing method for case-based reasoning using self-organizing maps and learning vector quantization for bond rating cases. Expert Systems with Applications 21 (2001) 147-156
21. Kumar P.R., and Ravi V. Bankruptcy prediction in banks and firms via statistical and intelligent techniques - a review. European Journal of Operational Research 180 (2007) 1-28
22. Last M., and Kandel A. Discovering useful and understandable patterns in manufacturing data. Robotics and Autonomous Systems 49 (2004) 137-152
23. T.-S. Li, C.-L. Huang, Defect spatial pattern recognition using a hybrid SOM-SVM approach in semiconductor manufacturing, Expert Systems with Applications, Available online 9 October, 2007.
24. H. Li, J. Sun, B.-L. Sun, Financial distress prediction based on OR-CBR in the principle of k-nearest neighbors, Expert Systems with Applications, Available online October 2007.
25. Liao S.-H. Expert system methodologies and applications - a decade review from 1995 to 2004. Expert Systems with Applications 28 (2005) 93-103
26. Liao T.W. An investigation of a hybrid CBR method for failure mechanisms identification. Engineering Applications of Artificial Intelligence 17 (2004) 123-134
27. Liu C.-H., Chen L.-S., and Hsu C.-C. An association-based case reduction technique for case-based reasoning. Information Sciences 178 (2008) 3347-3355
28. Liu H., and Motoda H. Feature Selection for Knowledge Discovery and Data Mining (1998), Kluwer, Norwell, MA
29. Romaniuk S.G., and Hall L.O. SC-net: a hybrid connectionist, symbolic system. Information Sciences 71 (1993) 223-268
30. Saridakis K.M., and Dentsoras A.J. Case-DeSC: a system for case-based design with soft computing techniques. Expert Systems with Applications 32 (2007) 641-657
31. Shin C.K., and Park S.C. Memory and neural network based expert system. Expert Systems with Applications 16 (1999) 145-155
32. Sobrino M.D.C., and Bravo L.J.B. Knowledge acquisition from batch semiconductor manufacturing data. Intelligent Data Analysis 3 (1999) 399-408
33. Sun Z., Finnie G., and Weber K. Case base building with similarity relations. Information Sciences 165 (2004) 21-43
34. Tan K.H., Lim C.P., Platts K., and Koay H.S. An intelligent decision support system for manufacturing technology investments. International Journal of Production Economics 104 (2006) 179-190
35. Wang C.-H. Recognition of semiconductor defect patterns using spatial filtering and spectral clustering. Expert Systems with Applications 34 (2008) 1914-1923
36. Wang F.-K. Process yield with measurement errors in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing 21 (2008) 279-284
37. Wettschereck D., Aha D.W., and Mohri T. A review and empirical evaluation of feature weighting methods for a class of lazy learning algorithms. Artificial Intelligence Review 11 (1997) 273-314
38. Wyns B., Boullart L., Sette S., Baeten D., Hoffman I., and Keyser F.D. Prediction of arthritis using a modified Kohonen mapping and case based reasoning. Engineering Applications of Artificial Intelligence 17 (2004) 205-211
39. Yang B.-S., Han T., and Kim Y.-S. Integration of ART-Kohonen neural network and case-based reasoning for intelligent fault diagnosis. Expert Systems with Applications 26 (2004) 387-395
40. Yang T., Rajasekharan M., and Peters B.A. Semiconductor fabrication facility design using a hybrid search methodology. Computers and Industrial Engineering 36 (1999) 565-583
41. Yu W.-D., and Liu Y.-C. Hybridization of CBR and numeric soft computing techniques for mining of scarce construction databases. Automation in Construction 15 (2006) 33-46
42. Zhang L., Coenen F., and Leng P. Formalising optimal feature weight setting in case based diagnosis as linear programming problems. Knowledge-Based Systems 15 (2002) 391-398