Hybrid machine learning system for integrated yield management in semiconductor manufacturing

Expert Systems with Applications

Volumn 15, Issue 2, 1998, Pages 123-132

  Kang, Boo Sik ^a   Lee, Jang Hee ^b   Shin, Chung Kwan ^a   Yu, Song Jin ^a   Park, Sang Chan ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Inductive learning; Knowledge based system; Neural networks; Yield management

Indexed keywords

EID: 0001315120     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4174(98)00017-7     Document Type: Article

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