Process yield with measurement errors in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 21, Issue 2, 2008, Pages 279-284

  Wang, Fu Kwun ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Capability testing; Lower confidence bound; Measurement errors; Process yield

Indexed keywords

DATA REDUCTION; MEASUREMENT ERRORS; PROCESS MONITORING;

CAPABILITY TESTING; LOWER CONFIDENCE BOUND; PROCESS YIELD;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 43849084375     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2008.2000270     Document Type: Conference Paper

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