Piezoresistive cantilever for accurate force measurements at the micro/nano-size level

Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008

Volumn 2, Issue , 2008, Pages 867-872

  Kim, Min Seok ^a,c   Choi, Jae Hyuk ^a   Bae, Nam Ho ^b   Kim, Byoung Ll ^b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Senior Engineer National Nano Fabrication Center   (South Korea)

^c Science Town   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; FORCE MEASUREMENT; PROBES; STIFFNESS;

AFM; AFM PROBES; APPLIED FORCES; ATOMIC FORCE MICROSCOPES; CONTACT POSITIONS; ELECTRICAL SIGNALS; FORCE CALIBRATIONS; FORCE SENSITIVITIES; FULL BRIDGES; PIEZO-RESISTIVE CANTILEVERS; PIEZO-RESISTORS; TEMPERATURE INDEPENDENCIES; TEST RESULTS;

NANOCANTILEVERS;

EID: 57649220238     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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