Deposition of zinc oxide thin films in supercritical carbon dioxide solutions

Applied Physics Express

Volumn 1, Issue 6, 2008, Pages 0612011-0612013

  Kondoh, Eiichi ^a   Sasaki, Kenji ^a   Nabetani, Yoichi ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; CARBON FILMS; CARBON MONOXIDE; CORUNDUM; DISSOLUTION; DISSOLVED OXYGEN; EMISSION SPECTROSCOPY; LEAKAGE (FLUID); OXIDE FILMS; OXIDES; OXYGEN; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THICK FILMS; THIN FILMS; ZINC; ZINC OXIDE;

CRYSTALLINE FILMS; EDGE EMISSIONS; PHOTOLUMINESCENCE SPECTRUMS; SUPERCRITICAL CARBON DIOXIDES; SUPERCRITICAL CO; ZINC OXIDE THIN FILMS; ZNO THIN FILMS;

SUPERCRITICAL FLUID EXTRACTION;

EID: 57649101770     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.1.061201     Document Type: Article

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