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Volumn 6923, Issue , 2008, Pages

EUV resist based on low molecular weight PHS

Author keywords

EUV resist; Imino sulfonate; Non chemically amplified resist; Polyhydroxystyrene; Polyvinylphenol

Indexed keywords

COPOLYMERIZATION; MOLECULAR WEIGHT; MOLECULAR WEIGHT DISTRIBUTION; MONOMERS; PHOTORESISTORS; PHOTORESISTS; PHOTOSENSITIZERS; POLYMERS; SILANES; ULTRAVIOLET DEVICES;

EID: 57349150254     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.771774     Document Type: Conference Paper
Times cited : (8)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.