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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2524-2528

Directed self-assembly of individual vertically aligned carbon nanotubes

(5) Goyal, Amit a Liu, Sheng a Iqbal, Zafar a Fetter, Linus A a Farrow, Reginald C a,b

a NEW JERSEY INSTITUTE OF TECHNOLOGY (United States)

b LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT ARCHITECTURES; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; CURRENT GENERATIONS; DIRECTED SELF ASSEMBLIES; FINITE ELEMENT ANALYSIS; INSULATING THIN FILMS; METAL LEVELS; PROCESS INTEGRATIONS; PROCESS TECHNOLOGIES; VERTICALLY ALIGNED CARBON NANOTUBES;

ASPECT RATIO; CARBON FILMS; CHARGE COUPLED DEVICES; ELECTRIC FIELDS; ELECTRON OPTICS; ELECTROPHORESIS; ELECTROSTATIC LENSES; FIELD EFFECT TRANSISTORS; FINITE ELEMENT METHOD; INSULATION; LENSES; LOGIC CIRCUITS; METALLIC COMPOUNDS; MOS DEVICES; NANOCOMPOSITES; NANOTUBES; SEMICONDUCTOR MATERIALS; THICK FILMS; THREE DIMENSIONAL; TRANSISTORS; WINDOWS;

CARBON NANOTUBES;

EID: 57249086299 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2990788 Document Type: Article

Times cited : (7)

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