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Volumn , Issue , 2006, Pages

Nanoscale analysis of laser ablated thin films used in industrial manufacturing of flat panel displays

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED ANALYTICS; ATOMIC FORCE MICROSCOPY; FLAT PANEL DISPLAYS; ITO GLASS; OPTICAL PUMPING; PLASMA DISPLAY DEVICES; PULSED LASERS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TIN OXIDES; ULTRAFAST LASERS;

EID: 56749185473     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5060896     Document Type: Conference Paper
Times cited : (7)

References (16)
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    • Venkat, S., Dunsky, C., (2006) Laser Patterning of ITO in Flat Panel Display Manufacturing, Photon Processing in Microelectronics and Photonics V Photonics West, San Jose, Proceedings of SPIE Vol. 6106, 610602
    • (2006) Proceedings of SPIE , vol.6106 , pp. 610602
    • Venkat, S.1    Dunsky, C.2
  • 4
    • 0037459323 scopus 로고    scopus 로고
    • Plasma display panels: Physics, recent developments and key issues
    • Beouf, J. P., (2003) Plasma display panels: physics, recent developments and key issues, Journal of Physics D: Applied Physics, 36, R53-R79
    • (2003) Journal of Physics D: Applied Physics , vol.36
    • Beouf, J.P.1
  • 6
    • 18744370449 scopus 로고    scopus 로고
    • Microprocessing of ITO and a-Si thin films using ns laser sources
    • Molpeceres, C., et al (2005) Microprocessing of ITO and a-Si thin films using ns laser sources, Journal of Micromechanics and Microengineering, 15, 1271-1278
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , pp. 1271-1278
    • Molpeceres, C.1
  • 7
    • 17044403452 scopus 로고    scopus 로고
    • Minami, T. (2005) Transparent conducting oxide semiconductors for transparent electrodes, Journal of Semiconductor Science and Technology, 20 S35-S44
    • Minami, T. (2005) Transparent conducting oxide semiconductors for transparent electrodes, Journal of Semiconductor Science and Technology, 20 S35-S44
  • 10
    • 4344605121 scopus 로고    scopus 로고
    • Excimer laser patterning of thick and thin films for high density packaging
    • Rumsby, P., Harvey, E., Thomas, D., Rizvi, N., (2005) Excimer laser patterning of thick and thin films for high density packaging, Proceedings of SPIE Vol. 3184
    • (2005) Proceedings of SPIE , vol.3184
    • Rumsby, P.1    Harvey, E.2    Thomas, D.3    Rizvi, N.4
  • 13
    • 0001517650 scopus 로고    scopus 로고
    • High-speed maskless laser patterning of indium tin oxide thin films
    • Yavas, O., Takai, M., (1998) High-speed maskless laser patterning of indium tin oxide thin films, Journal of Applied Physics Letters, Vol. 73, No. 18 pp.2558-2560
    • (1998) Journal of Applied Physics Letters , vol.73 , Issue.18 , pp. 2558-2560
    • Yavas, O.1    Takai, M.2
  • 14
    • 0028769191 scopus 로고
    • Maskless patterning of indium tin oxide layer for flat panel displays by diode-pumped Nd:YLF laser irradiation
    • Takai, M., Bollmann, D., Haberger, K., (1994) Maskless patterning of indium tin oxide layer for flat panel displays by diode-pumped Nd:YLF laser irradiation, Journal of Applied Physics Letters, Vol. 64, No. 19 pp.2560-2562
    • (1994) Journal of Applied Physics Letters , vol.64 , Issue.19 , pp. 2560-2562
    • Takai, M.1    Bollmann, D.2    Haberger, K.3
  • 15
    • 0011144750 scopus 로고    scopus 로고
    • Yavas, O., Ochiai, C., Takai, M., (1999) Substrate-assisted laser patterning of indium tin oxide thin films, Journal of Applied Physics A, 69, [Supplemental], S875-878
    • Yavas, O., Ochiai, C., Takai, M., (1999) Substrate-assisted laser patterning of indium tin oxide thin films, Journal of Applied Physics A, 69, [Supplemental], S875-878
  • 16
    • 0000110757 scopus 로고    scopus 로고
    • Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide
    • Yavas, O., Takai, M., (1999) Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide, Journal of Applied Physics, Vol. 85, No. 8 pp.4207-4212
    • (1999) Journal of Applied Physics , vol.85 , Issue.8 , pp. 4207-4212
    • Yavas, O.1    Takai, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.