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Volumn 3184, Issue , 1997, Pages 176-185
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Excimer laser patterning of thick and thin films for high density packaging
a
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Author keywords
Laser patterning; Mask projection; Thick film; Thin film
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Indexed keywords
ELECTRONIC EQUIPMENT MANUFACTURE;
EXCIMER LASERS;
GAS LASERS;
LASERS;
METAL RECOVERY;
MICROELECTRONIC PROCESSING;
MICROELECTRONICS;
POLYMER FILMS;
PRINTED CIRCUITS;
SCANNING;
SENSORS;
SOLIDS;
THICK FILM DEVICES;
THICK FILMS;
THIN FILM CIRCUITS;
THIN FILM DEVICES;
THIN FILMS;
ABLATION RATES;
DIELECTRIC LAYERS;
ELECTRICAL CIRCUITS;
EVAPORATED FILMS;
EXCIMER;
FLEXIBLE PRINTED CIRCUITS;
HIGH DENSITIES;
HIGH RESOLUTIONS;
HIGH SPEEDS;
INTERCONNECT CIRCUITS;
INTERCONNECTION DEVICES;
LASER PROJECTIONS;
LASER SHOTS;
LASER VIA DRILLINGS;
LOW COSTS;
MASK PROJECTION;
METAL FILMS;
METAL LAYERS;
METAL REMOVALS;
METALLIC LAYERS;
MINIATURE SENSORS;
MULTIPLE LAYERS;
POLYMER THICK FILMS;
PULSED ENERGIES;
SCANNING METHODS;
SENSOR DEVICES;
SPUTTERED FILMS;
STEP AND REPEATS;
THICK AND THIN FILMS;
WORK PIECES;
THICK FILM CIRCUITS;
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EID: 4344605121
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.280571 Document Type: Conference Paper |
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Times cited : (30)
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References (3)
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