Direct write patterning of ito film by femtosecond laser ablation

24th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2005 - Congress Proceedings

Volumn , Issue , 2005, Pages 20-27

  Choi, Hae Woon ^a   Farson, Dave ^a   Kim, Kwang Ryul ^c   Hong, Soon Kug ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b LG Electronics Inc   (South Korea)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

NANOMACHINING; PULSE ENERGY; SPOT DIAMETERS;

ATOMIC FORCE MICROSCOPY; FLAT PANEL DISPLAYS; INDIUM COMPOUNDS; LASER PULSES; POLARIZATION; THIN FILMS;

LASER ABLATION;

EID: 33645148425     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Radhouane Bel Hadj Tahar, Takayuki Ban, Yutaka Ohya, and Yasutaka Takahashi, "Tin doped indium oxide thin films: Electrical properties", Journal of Applied Phys., Vol. 83, No. 5, 1 March 1998
2. S.H. Yeo and E.C. Tan, "Micromachining of assembled liquid crystal displays", Imech E 2001
3. K. Sreeniva, T. Sidersena Rao, and Abhai Mansingh, "Preparation and chararacterization of RF sputtered Indium Tin Oxide Films", Journal of Applied Phys., Vol. 57, No. 2, January 1985
4. Tobias Gerfin and Michael Gratzel, "Optical properties of tin-doped indium oxide determined by spectroscopic ellipsometry", Journal of Applied Phys., 79 (3), 1 February 1996
5. Adela Ben-Yakar, "Femtosecond laser ablation properties of borosilicate glass", Journal of Applied Phys., Vol. 96, No. 9 November 2004