Formation of atomic secondary ions in sputtering

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 1194-1200

  Wucher, A ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Ion formation; Ionization mechanism; Ionization probability; Oxygen effect

Indexed keywords

ATOMS; IONIZATION; OXYGEN; SECONDARY EMISSION;

ION FORMATION; IONIZATION MECHANISMS; IONIZATION PROBABILITIES; MATRIX EFFECTS; OXYGEN EFFECT; SECONDARY IONS; STATISTICAL DISTRIBUTION; SURFACE EMISSIONS;

IONS;

EID: 56449086931     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.252     Document Type: Article

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