Inverse Velocities of Sputtered Monatomic Ions: Systematics and Quantification

Mikrochimica Acta

Volumn 125, Issue 1, 1997, Pages 317-323

  Lodding, Alexander R ^a   Van Der Heide, Paul A W ^b   Brown, James D ^b   Södervall, Ulfs ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

Elemental analysis; Ionization mechanisms; Quantitation; Secondary ion mass spectrometry (SIMS); Sputtering

Indexed keywords

EID: 0000017392     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf01246205     Document Type: Article

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