Determination of energy dependent ionization probabilities of sputtered particles

Applied Surface Science

Volumn 252, Issue 19, 2006, Pages 6452-6455

  Mazarov, P ^a   Samartsev, A V ^a   Wucher, A ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Kinetic energy distribution; Spectral ionization probability; Sputtering

Indexed keywords

ELEMENTARY PARTICLES; IMPACT IONIZATION; MASS SPECTROMETRY; MATHEMATICAL MODELS; SPECTRUM ANALYSIS;

INSTRUMENT TRANSMISSION; KINETIC ENERGY DISTRIBUTION; PULSED ION EXTRACTION SCHEME; SPECTRAL IONIZATION PROBABILITY;

SPUTTERING;

EID: 33747157660     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.071     Document Type: Article

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