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Volumn 93, Issue 18, 2008, Pages
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High-resolution characterization of defects in oxide thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCES;
BAND GAPS;
CURRENT INCREASES;
ELECTRICAL PROPERTIES;
HIGH RESOLUTIONS;
LEAKAGE CURRENT MEASUREMENTS;
OXIDE THIN FILMS;
SPATIAL RESOLUTIONS;
STRESS INDUCED;
TIP RADIUSES;
ELECTRIC CURRENT MEASUREMENT;
ELECTRIC PROPERTIES;
LEAKAGE CURRENTS;
OXIDE FILMS;
THICK FILMS;
LEAKAGE (FLUID);
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EID: 55849149448
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2982082 Document Type: Article |
Times cited : (7)
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References (14)
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