Thin Pb(ZrxTi1- x)O3 (PZT) rhombohedral compositions deposited on the si-substrate and its non-linear piezoelectric response

Ferroelectrics

Volumn 351, Issue 1 PART 1, 2007, Pages 112-121

  Nosek, J ^a   Pokorny, M ^a   Sulc, M ^a   Burianova, L ^a   Soyer, C ^b   Remiens, D ^b  

^a TECHNICAL UNIVERSITY OF LIBEREC   (Czech Republic)

^b UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

Double beam interferometer; FEM; Non linear properties; Strain distribution; Thin PZT film

Indexed keywords

CAPACITANCE VOLTAGE; DOUBLE BEAM INTERFEROMETERS; DOUBLE-BEAM; DYNAMIC DEFORMATION; LASER INTERFEROMETER; LEAD ZIRCONATE; NON-LINEAR; NONLINEAR BEHAVIOURS; NONLINEAR PIEZOELECTRIC PROPERTIES; NONLINEAR PROPERTIES; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC HYSTERESIS; PIEZOELECTRIC RESPONSE; PZT; PZT FILM; PZT THIN FILM; RHOMBOHEDRAL COMPOSITION; RHOMBOHEDRAL PHASE; ROOM TEMPERATURE; SI SUBSTRATES; STRAIN DISTRIBUTIONS; TEMPERATURE DEPENDENCIES;

ELECTRIC FIELDS; FINITE ELEMENT METHOD; HELIUM; INTERFEROMETERS; LASER INTERFEROMETRY; LEAD; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZIRCONIUM;

PIEZOELECTRIC ACTUATORS;

EID: 55649097572     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190701354075     Document Type: Conference Paper

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