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Volumn 47, Issue 7 PART 1, 2008, Pages 5477-5481

High-temperature complex refractive index of phase change recording medium of Ge2Sb2Te5 determined using phase change static tester and spectroscopic ellipsometer

(6) Li, Xue Zhe a Choi, Joong Kyu a Byun, Young Sup a Kim, Sang Youl a Sim, Kyung Soo b Kim, Soo Kyung b

a Ajou University (South Korea)

b Nanostorage Inc (South Korea)

Author keywords

GST; High temperature complex refractive index; In situ ellipsometer; Phase change optical recording; PRAM; Spectroscopic ellipsometry

Indexed keywords

DATA RECORDING; ELLIPSOMETRY; GERMANIUM; LIGHT MEASUREMENT; LIGHT REFRACTION; OPTICAL MATERIALS; OPTICAL PROPERTIES; OPTICAL RECORDING; ORGANIC POLYMERS; PHOTORESISTS; RANDOM ACCESS STORAGE; REFRACTIVE INDEX; REFRACTOMETERS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE ROUGHNESS; SYSTEM THEORY; TELLURIUM COMPOUNDS; THICK FILMS; THIN FILMS;

GST; HIGH-TEMPERATURE COMPLEX REFRACTIVE INDEX; IN SITU ELLIPSOMETER; PHASE CHANGE OPTICAL RECORDING; PRAM;

PHASE CHANGE MEMORY;

EID: 55149119160 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.5477 Document Type: Article

Times cited : (2)

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