Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 8 A, 2006, Pages 6452-6454

  Kim, Younhwa ^a   Kim, Sang Jun ^a   Kim, Sang Youl ^a   An, Sung Hyuck ^a   Suh, Dong Seok ^b   Noh, Jin Seo ^b   Lee, Sang Mock ^b   Kim, Kijoon H P ^b   Shin, Woong Chul ^b   Khang, Yoonho ^b  

^a Ajou University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Crystallization kinetic; Ge Sb Te; Phase change optioal disk; PRAM; Time resolved ellipsometry

Indexed keywords

ELLIPSOMETRY; FOCUSING; LIGHT POLARIZATION; NANOTECHNOLOGY; POLARIMETERS;

CRYSTALLIZATION KINETICS; GE-SB-TE; PHASE CHANGE OPTICAL DISKS; PRAM; TIME-RESOLVED ELLIPSOMETRY;

RANDOM ACCESS STORAGE;

EID: 33748538732     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.6452     Document Type: Article

References (9)

1. S. R. Ovshinsky and B. Pashmakov: Mater. Res. Soc. Symp. Proc. 803 (2004) 49.
2. T. A. Lowery, S. J. Hudgens, W. Czubatyj, C. H. Dennison, S. A. Kostylev and G. C. Wicker: Mater. Res. Soc. Symp. Proc. 803 (2004) 101.
3. C. Peng, R. Liang, J. K. Erwin, W. Bietscher, K. Nagata and M. Mansuripur: Appl. Opt. 40 (2001) 5088.
4. S. Y. Kim, S. J. Kim, H. Seo and M. R. Kim: Jpn. J. Appl. Phys. 38 (1999) 1713.
5. T. Ide, M. Suzuki and M. Okada: Jpn. J. Appl. Phys. 34 (1995) L529.
6. T. H. Jeong, M. R. Kim, H. Seo, S. J. Kim and S. Y. Kim: J. Appl. Phys. 86 (1999) 774.
7. R. M. A. Azzam: Opt. Acta 29 (1982) 491.
8. S. Y. Kim and S. J. Kim: Hankook Kwanghak-Hoeji 12 (2001) 184 [in Korean].
9. S. J. Kim, Y. D. Park, S. H. An and S. Y. Kim: Thin Solid Films 455-456 (2004) 675.