A novel fabrication method for forming inclined groove-based microstructures using optical elements

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5287-5290

  Huang, Ying Jui ^a,b   Chang, Tien Li ^b   Chou, Hwai Pwu ^a   Lin, Cheng Hsuan ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Backlight modules; Inclined microgroove; Microstructure; Photolithography; Prism

Indexed keywords

ELECTROMAGNETIC WAVES; FABRICATION; LIGHT; LIGHT SOURCES; LIGHTING; LIQUID CRYSTAL DISPLAYS; LIQUID CRYSTALS; OPTICAL DEVICES; OPTICAL MATERIALS; PHOTOLITHOGRAPHY; PRISMS; SURFACE ROUGHNESS;

BACKLIGHT MODULES; BEARING POINTS; CONVENTIONAL PHOTOLITHOGRAPHIES; FABRICATION METHODS; INCLINED MICROGROOVE; MICROSTRUCTURE SURFACES; OPTICAL ELEMENTS; OPTICAL PATHS; RANGING; SMOOTH SURFACES; SNELL'S LAWS; ULTRAVIOLET LITS;

MICROSTRUCTURE;

EID: 55049124402     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5287     Document Type: Article

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