3D diffuser lithography: A novel method to fabricate various rounded microstructures

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1457-1460

  Chang, Sung Il ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

3D lithography; 3D microstructures; Diffuser; Rounded cross section

Indexed keywords

ARRAYS; DIFFUSERS (OPTICAL); MICROELECTROMECHANICAL DEVICES; MICROLENSES; MICROSTRUCTURE; OPTICAL SWITCHES; PHOTORESISTS; THREE DIMENSIONAL;

3D LITHOGRAPHY; 3D MICROSTRUCTURES; DIFFUSERS; ROUNDED CROSS-SECTION;

LITHOGRAPHY;

EID: 27544505355     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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