Low frequency noise measurement and analysis of capacitive micro-accelerometers: Temperature effect

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5270-5273

  Mohd Yasin, Faisal ^a   Nagel, David J ^b   Ong, D S ^a   Korman, Can E ^b   Chuah, H T ^a  

^a MULTIMEDIA UNIVERSITY   (Malaysia)

^b George Washington University   (United States)

Author keywords

Acceleration dependent; Accelerometer; Noise; Temperature dependent

Indexed keywords

ACOUSTIC NOISE MEASUREMENT; CONTRACTS; THERMAL NOISE;

1/F NOISES; CAPACITIVE; HIGHER FREQUENCIES; LIMITING FACTORS; LOW FREQUENCIES; LOW-FREQUENCY NOISES; MEASUREMENT SYSTEMS; NOISE; NOISE MEASUREMENTS; SPECTRAL BEHAVIORS; TEMPERATURE DEPENDENTS; TEMPERATURE EFFECTS;

ACCELEROMETERS;

EID: 55049103003     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5270     Document Type: Article

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