Low frequency noise measurement and analysis of capacitive micro-accelerometers

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1788-1791

  Mohd Yasin, F ^a   Nagel, D J ^b   Ong, D S ^a   Korman, C E ^b   Chuah, H T ^a  

^a MULTIMEDIA UNIVERSITY   (Malaysia)

^b George Washington University   (United States)

Author keywords

Acceleration dependent; Low frequency noise measurement; Micro accelerometers

Indexed keywords

ACCELERATION MEASUREMENT; ACCELEROMETERS; CAPACITANCE; NATURAL FREQUENCIES; SPECTRUM ANALYSIS;

ACCELERATION DEPENDENCE; CAPACITIVE MICROACCELEROMETERS; LOW FREQUENCY NOISE MEASUREMENT; MICRO ACCELEROMETERS;

SIGNAL NOISE MEASUREMENT;

EID: 34247557003     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.168     Document Type: Article

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