Measuring and interpreting the mechanical-thermal noise spectrum in a MEMS

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  Rocha, L A ^a   Cretu, E ^b   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Melexis   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTRON TUNNELING; ELECTROSTATICS; FAST FOURIER TRANSFORMS; FREQUENCIES; MICROSTRUCTURE; PRESSURE EFFECTS; WHITE NOISE;

CIRCUIT NOISE; NOISE LEVEL; NOISE SPECTRUM; READOUT CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 21044442528     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/005     Document Type: Article

References (23)

1. Wolffenbuttel R F 1996 Silicon Sensors and Circuits; On-Chip Compability (London: Chapman and Hall)
2. Gabrielson T B 1993 Mechanical-thermal noise in micromachined acoustic and vibration sensors IEEE Trans. Electron Devices 40 903-9
3. Rockstad H K, Kenny T W, Reynolds J K, Kaiser W J and Gabrielson A T B 1994 Miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers Sensors Actuators A 43 107-114
4. Zuckerwar A J 1994 Measured 1/f noise in the membrane motion of condenser microphones J. Acoust. Soc. Am. 95 1419-25
5. Zuckerwar A J and Kuhn T R 2003 Background noise in piezoresistive, electret condender and ceramic microphones J. Acoust. Soc. Am. 113 3179-87
6. Amini B V, Pourkamali S and Ayazi F 2004 A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25 νm CMOS interface Proc. MEMS'04 (Maastricht, The Netherlands, 25-29 January 2004) pp 572-5
7. Chae J, Kulah H and Najafi K 2003 A monolithic three-axis silicon capacitive accelerometer with micro-G resolution Proc. Transducers'03 (Boston, MA, 8-12 June 2003) pp 81-4
8. Rocha L A, Cretu E and Wolffenbuttel R F 2004 Behavioural analysis of the pull-in dynamic transition J. Micromech. Microeng. 14 S37-S42
9. Tilmans H A C and Legtenberg R 1994 Electrostatically driven vacuum-encapsulated polysilicon resonators: part 2. Theory and performance Sensors Actuators A 45 67-84
10. Rocha L A, Cretu E and Wolffenbuttel R F 2004 Analytical model for the pull-in time of low-Q MEMS devices Proc. Nanotech 2004 (Boston, MA, 7-11 March 2004) pp 271-4
11. Djuric Z 2000 Mechanisms of noise sources in microelectromechanical systems Microelectron. Reliab. 40 919-32
12. Rocha L A, Cretu E and Wolffenbuttel R F 2004 Pull-in dynamics: analysis and modeling of the transitional regime Proc. MEMS'04 (Maastricht, The Netherlands, 25-29 January 2004) pp 249-52
13. Peterson K E 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
14. Oja A S, Kyynäräinen J, Seppä H and Lampola T 2000 A micromechanical dc voltage reference Conf. Digest. CPEM'00 (Sydney, Australia, 14-19 May 2000) pp 701-2
15. Cretu E, Rocha L A and Wolffenbuttel R F 2001 Micromechanical voltage reference using the pull-in of a beam IEEE Trans. Instrum. Meas. 50 1504-7
16. Rocha L A, Cretu E and Wolffenbuttel R F 2004 Compensation of temperature effects on the pull-in voltage of microstructures Sensors Actuators A 115 351-6
17. http://www.europractice.bosch.com/en/start/index.htm
18. Offenberg M, Lärmer F, Elsner B, Münzel H and Riethmüller W 1995 Novel process for an integrated accelerometer Proc. Transducers95 (Stockholm, Sweden, 25-29 June 1995) pp 589-93
19. Burstein A and Kaiser W J 1995 Mixed analog-digital highly-sensitive sensor interface circuit for low-cost microsensors Proc. Tranducers95 (Stockholm, Sweden, 25-29 June 1995) pp 162-5
20. Rocha L A, Cretu E and Wolffenbuttel R F 2003 Displacement model for dynamic pull-in analysis and application in large-stroke electrostatic actuators 17th Proc. Eurosensors (Guimarães, Portugal 2003) pp. 448-51
21. West B J and Schlesigner M F 1990 The noise in natural phenomena Am. Sci. 78 40-45
22. Wong H 2003 Low-frequency noise study in electron devices: review and update Microelectron. Reliab. 43 585-99
23. Bosch 2002 Micromachining Foundry Design Rules version 3.0