A linear model based noise evaluation of a capacitive servo-accelerometer fabricated by MEMS

ieice electronics express

Volumn 2, Issue 6, 2005, Pages 198-204

  Yoshida, Yusaku ^a   Kakuma, Hideaki ^a   Asanuma, Hiroshi ^b   Niitsuma, Hiroaki ^b  

^a MITUTOYO CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

linear model; MEMSaccelerometer; noise

Indexed keywords

EID: 85009578294     PISSN: 13492543     EISSN: None     Source Type: Journal    
DOI: 10.1587/elex.2.198     Document Type: Article

References (5)

1. H. Niitsuma, “Concept of Subsurface Micro-sensing,” Proc. 96th SEGJConf., pp. 33-34, 1997. (in Japanese)
2. T. B. Gabrielson, “Mechanical-Thermal Noise in Micromachined Acoustic and Vibration Sensors,” IEEE Trans. Electron Devices, vol. ED-40, pp. 903-909, 1993.
3. R.P. van Kampen, Bulk-Micromachined Capacitive Servo-Accelerometer, Delft University Press, 1995.
4. S. Fukui and R. Kaneko, “Analysis of ultra-thin gas film lubrication based on linearized Boltzman equation: first report-derivation of a generalized lubrication equation including thermal creep flow,” J. Tribol. Trans. AMSE, vol. 110, pp. 253-262, April 1988.
5. T. Veijola, H. Kuisma, J. Lahdenpera, and T. Ryhanen, “Equivalent circuit model of the squeezed gas film in a silicon accelerometer,” Sensorsand Actuators, A48, pp. 239-248, Oct. 1995.