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Volumn 47, Issue 6 PART 1, 2008, Pages 4638-4642
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High speed pulse measurement of micro ferroelectric capacitors using a multi-probe atomic force microscope
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Author keywords
AFM; Failure analysis; Multiprobe; Nanoprobe; Single bit; SPM
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ATOMIC PHYSICS;
ATOMS;
CAPACITORS;
CELLS;
CYTOLOGY;
DATA STORAGE EQUIPMENT;
DIELECTRIC DEVICES;
ELECTRIC EQUIPMENT;
ELECTROLYSIS;
FAILURE ANALYSIS;
MICROSCOPIC EXAMINATION;
QUALITY ASSURANCE;
SAFETY FACTOR;
SPEED;
AFM;
AFM SYSTEMS;
ATOMIC FORCE MICROSCOPES;
BIT CELLS;
BOTTOM ELECTRODES;
CELL SIZES;
DEVICE TESTING;
ELECTRICAL CHARACTERISTICS;
FAST PULSES;
FERROELECTRIC CAPACITORS;
HIGH SPEEDS;
MULTIPROBE;
NANO-SECONDS;
PULSE MEASUREMENTS;
PULSE WIDTHS;
RISE TIMES;
SINGLE-BIT;
SPM;
SQUARE PULSES;
SWITCHABLE POLARIZATIONS;
CAPACITANCE;
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EID: 55049090580
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.4638 Document Type: Article |
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Times cited : (7)
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References (10)
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