Model validation and performance prediction in the design of micro systems

JVC/Journal of Vibration and Control

Volumn 14, Issue 11, 2008, Pages 1711-1728

  Anac, Ozan ^a   Basdogan, Ipek ^a  

^a KOÇ UNIVERSITY   (Turkey)

Author keywords

MEMS design; Model validation; Performance prediction

Indexed keywords

DAMPING; DATA ACQUISITION; DESIGN; EXPERIMENTS; FINITE ELEMENT METHOD; FORECASTING; LARGE SCALE SYSTEMS; LATTICE VIBRATIONS; MIRRORS; PROCESS ENGINEERING; SCANNING; SENSITIVITY ANALYSIS; STATE SPACE METHODS; STRUCTURAL PANELS;

CASE STUDIES; CRITICAL DESIGN PARAMETERS; DATA ACQUISITION SYSTEMS; DESIGN COSTS; DESIGN METHODOLOGIES; DESIGN PARAMETERS; DESIGN PROCESSES; DESIGN STUDIES; DISTURBANCE ANALYSES; DISTURBANCE TORQUES; EMERGING TECHNOLOGIES; EXPERIMENTAL MODAL ANALYSES; EXPERIMENTAL PROCEDURES; FINITE ELEMENT MODELS; FINITE-ELEMENT ANALYSES; LASER DOPPLER VIBROMETER; LYAPUNOV APPROACHES; MEASURING; MEMS DESIGN; MICRO SCANNERS; MICRO SYSTEMS; MICRO-ELECTRO-MECHANICAL SYSTEMS; MODAL DAMPING; MODAL FREQUENCIES; MODE SHAPES; MODEL VALIDATION; MODEL VALIDATIONS; MODELING; PERFORMANCE PREDICTION; PERFORMANCE PREDICTIONS; PLANE VIBRATIONS; POSITIONING SYSTEMS; ROOT MEAN SQUARE VALUES; ROTATION ANGLES; STATE SPACE MODELS; STATE SPACES; SYSTEM PERFORMANCES; VIBRATION DATUM;

MODAL ANALYSIS;

EID: 54949101710     PISSN: 10775463     EISSN: 17412986     Source Type: Journal    
DOI: 10.1177/1077546307085346     Document Type: Article

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