Design methodology for microelectromechanical systems. Case study: Torsional scanner mirror

Journal of Mechanical Design

Volumn 129, Issue 10, 2007, Pages 1023-1030

  Meral, Faik Can ^a   Basdogan, Ipek ^a  

^a KOÇ UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC ANALYSIS; EIGENVALUES AND EIGENFUNCTIONS; LYAPUNOV METHODS; MEAN SQUARE ERROR; MIRRORS; MODAL ANALYSIS; OPTICAL TRANSFER FUNCTION; SENSITIVITY ANALYSIS; STATE SPACE METHODS;

DISTURBANCE TORQUE; GENERALIZED DESIGN APPROACH; OPTICAL MICROSYSTEMS;

MEMS;

EID: 35448929911     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2756087     Document Type: Article

References (21)

1. Clark, J. V., Zhou, N., and Pister, K. S. J., 1998, "MEMS Simulation Using SUGAR v0.5," Proceedings of Solid State Sensors and Actuators Workshop, pp. 191-196.
2. ANSYS Release 8.1 Manual.
3. Li, H., and Antonsson, E. K., 1998, "Evolutionary Techniques in MEMS Synthesis," Proceedings of ASME International Mechanical Engineering Congress and Exposition, Anaheim, CA, Nov.
4. Mukherjee, T., and Fedder, G. K., 1997, "Structured Design of Microelectromechanical Systems," Proceedings of Design Automation Conference, 34th Conference on DAC'97.
5. Zhou, N., Agogino, A., and Pister, K. S. J., 2002, "Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS)," Proceedings of the DETC 2002: Design Automation, Montreal, Canada.
6. Deshpande, M., and Saggere, L., 2005, "Modeling and Design of an Optically Powered Microactuator for a Microfluidic Dispenser," J. Mech. Des., 127(4), pp. 825-836.
7. Shi, F., Ramesh, P., and Mukherjee, S., 1995, "Simulation Methods for MicroElectro-Mechanical Structures (MEMS) With Application to a Microtweezer," Comput. Struct., 56(5), pp. 769-783.
8. Allen, M., Raulli, M., Maute, K., and Frangopol, D. M., 2004, "Reliability-Based Analysis and Design Optimization of Electrostatically Actuated MEMS," Comput. Struct., 82, pp. 1007-1020.
9. Sigmund, O., 2001, "Design of Multiphysics Actuators Using Topology Optimization - Part I: One Material Structures," Comput. Methods Appl. Mech. Eng., 190(49), pp. 6577-6604.
10. Lusk, C. P., and Howell, L. L., 2006, "Design Space of Single-Loop Planar Folded Micro Mechanisms With Out-of-Plane Motion," J. Mech. Des., 128(5), pp. 1092-1100.
11. Amman, C., 2004; "Design, Modeling and Characterization of Electrostatically Actuated Microscanners," Master thesis, Koc University.
12. Urey, H., and Dickensheets, D. L., 2004, Display and Imaging Systems, MOEMS and Applications, SPIE, Bellingham, WA, Chap. 8.
13. Shabana, A. A:, 1991, Theory of Vibration, Springer-Verlag, New York, Vol. 2.
14. Hatch, M. R., and Raton, B., 2001, Vibration Simulation Using MATLAB and ANSYS, Chapman and Hall CRC, London.
15. Polytec Portable Digital Vibrometer, PDV 100, Manual.
16. Urey, H., Kan, C., and Davis, W., 2005, "Vibration Mode Frequency Formulae for Micromechanical Scanners," J. Micromech. Microeng., 15, pp. 1713-1721.
17. Millonas, M. M., 1994, "Transport and Current Reversal in Stochastically Driven Ratchets," Phys. Lett. A, 185(1), pp. 65-69.
18. Gaji'c, Z., and Qureshi, M. T. J., 1995, Lyapunov Matrix Equation in System Stability and Control, Academic Press, San Diego.
19. Gutierrez, H. L., 1999, "Performance Assessment and Enhancement of Precision Controlled Structures During Conceptual Design," Ph.D thesis, Massachusetts Institute of Technology.
20. Fox, R. L., and Kapoor, M. P., 1968, "Rates of Change of Eigenvalues and Eigenvectors," AIAA J., 6, pp. 2426-2429.
21. Nelson, R. B., 1976, "Simplified Calculations of Eigenvector Derivatives," AIAA J., 14, pp. 1201-1205.