Damping of micro electrostatic torsion mirror caused by air-film viscosity

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 449-454

  Uchida, Norio ^a   Uchimaru, Kiyotaka ^a   Yonezawa, Minoru ^a   Sekimura, Masayuki ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTRODES; ELECTROSTATICS; FRICTION; MICROACTUATORS; MIRRORS; NUMERICAL ANALYSIS; VISCOSITY;

MICROELECTROSTATIC TORSION MIRRORS; REYNOLDS EQUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692835     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)