SCOPUS 정보 검색 플랫폼

Volumn 20, Issue 1, 2008, Pages 7-10

Atomic layer deposition - A tool for nanotechnology;Atomlagenabscheidung als Werkzeug für die Nanotechnologie

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; NANOTECHNOLOGY;

ATOMIC LEVELS; COMPLEX SURFACE; KEY ISSUES; PRECURSOR CHEMISTRY; SELF-LIMITING GROWTHS;

ATOMIC LAYER DEPOSITION;

EID: 54949084634 PISSN: 0947076X EISSN: None Source Type: Journal
DOI: 10.1002/vipr.200800339 Document Type: Article

Times cited : (3)

References (18)

3
- 0037156103
- M. Leskelä, M. Ritala, Thin Solid Films, 409, (2002), 138
- (2002) Thin Solid Films , vol.409 , pp. 138
- Leskelä, M.¹ Ritala, M.²

4
- 0344667722
- Edition
- M. Leskelä, M. Ritala, Angewandte Chemistry International Edition, 42(2003)5548
- (2003) Angewandte Chemistry International , vol.42 , pp. 5548
- Leskelä, M.¹ Ritala, M.²

5
- 21744444606
- R.L. Puurunen, J. of Appl. Physics, 97, (2005), 121301/1-121301/52
- R.L. Puurunen, J. of Appl. Physics, 97, (2005), 121301/1-121301/52

6
- 54949130393
- D. Schmidt, S. Strehle, M. Albert, W. Hentsch, J.W. Bartha, Veröffentlichung in Vorbereitung in Microelectronic Engineering
- D. Schmidt, S. Strehle, M. Albert, W. Hentsch, J.W. Bartha, Veröffentlichung in Vorbereitung in Microelectronic Engineering

7
- 28044447824
- E. Gerittsen et al., Solid-State Electron., 49, (2005), 1767
- (2005) Solid-State Electron , vol.49 , pp. 1767
- Gerittsen, E.¹

8
- 1542305382
- S. Jakschik, U. Schroeder, T. Hecht, G. Dollinger, A. Bergmaier, J.W. Bartha, Mater. Sci. Eng. , B 107, (2004), 251
- (2004) Mater. Sci. Eng. , B , vol.107 , pp. 251
- Jakschik, S.¹ Schroeder, U.² Hecht, T.³ Dollinger, G.⁴ Bergmaier, A.⁵ Bartha, J.W.⁶

9
- 34548213541
- W.S. Yang, Y.K. Kim, A.Y. Yang, J.H. Choi, H.S. Park, S.I. Lee, J.B. Yoo, Surf. Coat. Technol., 131, (2000), 79
- (2000) Surf. Coat. Technol , vol.131 , pp. 79
- Yang, W.S.¹ Kim, Y.K.² Yang, A.Y.³ Choi, J.H.⁴ Park, H.S.⁵ Lee, S.I.⁶ Yoo, J.B.⁷

10
- 54949094163
- C. Hossbach, M. Albert, B. Adolphi, R. Hübner, J.W. Bartha, AVS ALD Conference, 2005,
- (2005) Conference
- Hossbach, C.¹ Albert, M.² Adolphi, B.³ Hübner, R.⁴ Bartha, J.W.⁵ ALD, A.V.S.⁶

11
- 0142027025
- Y.J. Lee, S.W. Kang, J. Vac. Sci. Technol. A 21, (2003), 5, L13-L15
- (2003) J. Vac. Sci. Technol. A , vol.21 , Issue.5
- Lee, Y.J.¹ Kang, S.W.²

12
- 0034294315
- R. Solanki, B. Pathangey, Electroch. and Solid-State Letters, 3, (2000), 10, 479-480
- R. Solanki, B. Pathangey, Electroch. and Solid-State Letters, 3, (2000), 10, 479-480

13
- 0141857374
- M. A. Alam, M. L. Green, J. of Appl. Physics, 94, (2003), 5, 3403-3413
- (2003) J. of Appl. Physics , vol.94 , Issue.5 , pp. 3403-3413
- Alam, M.A.¹ Green, M.L.²

14
- 54949097555
- Helsinki
- F. H. Fabreguette, AVS ALD Conference, 2004, Helsinki
- (2004) Conference
- Fabreguette, F.H.¹ ALD, A.V.S.²

15
- 54949102960
- Helsinki
- M. Knez, AVS ALD Conference, 2004, Helsinki
- (2004) Conference
- Knez, M.¹ ALD, A.V.S.²

16
- 54949085238
- Seoul
- G. H. Hyde, K.-J. Park, S. M. Stewart, R. M. VanGundy, J. P. Hinestroza, G. N. Parsons, AVS ALD Conference, 2006, Seoul
- (2006) Conference
- Hyde, G.H.¹ Park, K.-J.² Stewart, S.M.³ VanGundy, R.M.⁴ Hinestroza, J.P.⁵ Parsons, G.N.⁶ ALD, A.V.S.⁷

17
- 54949083674
- Helsinki
- E. Graugnard, AVS ALD Conference, 2004, Helsinki
- (2004) Conference
- Graugnard, E.¹ ALD, A.V.S.²

18
- 27744501939
- G. Hakim, Chem. Vap. Deposition, 11, (2005), 420
- (2005) Chem. Vap. Deposition , vol.11 , pp. 420
- Hakim, G.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.