Comparative x-ray reflectometry and atomic force microscopy of surfaces with non-Gaussian roughness

Journal of Applied Physics

Volumn 104, Issue 6, 2008, Pages

  Mironov, V L ^a   Udalov, O G ^a   Gribkov, B A ^a   Fraerman, A A ^a  

^a INSTITUTE FOR PHYSICS OF MICROSTRUCTURES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749151064     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2977753     Document Type: Article

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