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Volumn 39, Issue 2, 2005, Pages
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Superpolishing deep-UV optics
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION COEFFICIENT;
COATED OPTICS;
DEEP ULTRAVIOLET OPTICS;
SUPERPOLISHED CRYSTALLINE SUBSTRATES;
SUPERPOLISHING;
ATOMIC FORCE MICROSCOPY;
COATING TECHNIQUES;
CRYSTALLINE MATERIALS;
INTERFEROMETRY;
LIGHT ABSORPTION;
LIGHT SCATTERING;
LIGHT TRANSMISSION;
MATERIALS TESTING;
POLISHING;
SURFACE ROUGHNESS;
ULTRAVIOLET DEVICES;
LASER OPTICS;
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EID: 15744393898
PISSN: 07311230
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (0)
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