Thermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage

Materials Research Society Symposium - Proceedings

Volumn 649, Issue , 2001, Pages

  Cross, G L W ^a   Despont, M ^a   Drechsler, U ^a   Durig U T ^a   Rothuizen, H ^a   Binnig, G K ^a   Vettiger, P ^a   King, W P ^a   Goodson, K E ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HEATING; INDENTATION; MOLECULES; RHEOLOGY; THERMAL EFFECTS; THERMOMECHANICAL TREATMENT; THICKNESS MEASUREMENT; THIN FILMS;

MACROSCOPIC POLYMER; NANOMETER SCALE INDENTATIONS; THERMAL SENSING; THERMOMECHANICAL WRITING;

POLYMETHYL METHACRYLATES;

EID: 0034861581     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)