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Materials Letters

Volumn 63, Issue 1, 2009, Pages 51-53

Local hardness and density variation in glass substrates machined with Spark Assisted Chemical Engraving (SACE)

(3) Didar, Tohid Fatanat a Dolatabadi, Ali a Wüthrich, Rolf a

a Gina Cody School of Engineering and Computer Science (Canada)

Author keywords

Glass 2D micro machining; Hardness; Mechanical properties; Nano indentation; Spark Assisted Chemical Engraving (SACE)

Indexed keywords

CHEMICAL PROPERTIES; CONDUCTIVE MATERIALS; ELECTRIC SPARKS; ELECTRONIC EQUIPMENT TESTING; ETCHING; GLASS; HARDNESS; MACHINING; MECHANICAL PROPERTIES; MICROMACHINING; NANOINDENTATION; TWO DIMENSIONAL;

DENSITY VARIATIONS; GLASS SUBSTRATES; GLASS SURFACES; LAB-ON-CHIP; MATERIAL REMOVALS; MICRO-FLUIDIC; SPARK ASSISTED CHEMICAL ENGRAVING (SACE); SPARK ASSISTED CHEMICAL ENGRAVINGS;

SURFACES;

EID: 54349125278 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/j.matlet.2008.08.056 Document Type: Article

Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.