Patterned crack-free PZT thick films for micro-electromechanical system applications

International Journal of Advanced Manufacturing Technology

Volumn 33, Issue 1-2, 2007, Pages 86-94

  Dauchy, F ^a   Dorey, R A ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

MEMS; Multilayer; Sol gel; Thick film

Indexed keywords

ELECTRODES; INFILTRATION; LEAD COMPOUNDS; MEMS; SOL-GEL PROCESS; WET ETCHING;

LOW FIRING TEMPERATURE; METAL ELECTRODES; REPEATED LAYERING;

THICK FILMS;

EID: 34250740960     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-007-0968-1     Document Type: Article

References (12)

1. Scharzer S, Roosen A (1999) Tape casting of piezoceramic/polymer composites. J Euro Ceram Soc 19:1007-1010
2. Liliehorn T, Johanson S (2004) Fabrication of multilayer 2D ultrasonic transducer microarrays by green machining. J Micromaching Microengineering 14:702-709
3. Simon Seveyrat L, Gonnard P (2003) Processing and characterization of piezoelectric thick films screen-printed on silicon and glass-ceramic substrates. Integr Ferroelectr 50:1-18
4. Cannell D, Trigg P (1990) Advanced ceramic processing and technology, Chap 4. Processing of electronic ceramics, pp 95
5. Ledermann N, Muralt P, Baborowski J, Gentil S, Mukati K, Cantoni M, Seifert A, Setter N (2003){l 0 0}-Textured, piezoelectrio Pb(Zrx, Til-x)O3 thin films for MEMS: integration, deposition and properties, Sens Actuators A 105:162-170
6. Meyerhofer D (1978) Characteristics of resist films produce by spinning. J Appl Phys 49(7):3993-3997
7. Livage J, Sanchez C (1992) Sol-gel chemistry. J Non-Cryst Solids 8:145
8. Whatmore RW, Zhang Q, Huang Z, Dorey RA (2003) Ferroelectric thin and thick films for microsystems. Mater Sci Semicond Process 5:65-76
9. Dorey RA, Stringfellow SB, Whatmore RW (2002) Effect of sintering aid and repeat sol infiltration on the dielectric and piezoelectric properties of a composite thick film. J Euro Ceram Soc 22:2921-2926
10. Duval FFFC, Dorey RA, Zhang Q, Whatmore RW (2003) Lead germanium oxide sinter-assisted PZT composite thick films. J Euro Ceram Soc 23:1935-1941
11. Zheng K, Lu J, Chu J (2003) Study on wet-etching of PZT thin film. "Microprocesses and nanotechnology conference international 2003. Dig Pap 29-31:248-249
12. Zhang Q, Corkovic S, Shaw CP, Huang Z, Whatmore RW (2005) Effect of porosity on the ferroelectric properties of sol-gel prepared lead titanate thin films. Thin Solid Films 488:258-264