Transmission electron microscopy of hard ceramic superlattices applied in silicon micro-electro-mechanical systems

Materials Chemistry and Physics

Volumn 81, Issue 2-3, 2003, Pages 265-268

  Wrzesinska H ^a   Ratajczak, J ^a   Studzinska K ^a   Katcki, J ^a  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

Ceramics; Nanohardness; SEM; Superlattices; TEM

Indexed keywords

CERAMIC MATERIALS; CRYSTAL ORIENTATION; HARDNESS; INDENTATION; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

NANOHARDNESS; NANOINDENTATION;

SEMICONDUCTOR SUPERLATTICES;

EID: 0038373460     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(02)00598-9     Document Type: Conference Paper

References (8)

1. Sproul W.D. Science. 273:1996;889.
2. Petrov I., Hultman L., Helmersson U., Sundgren J.E., Green J.E. Thin Solid Films. 169:1989;299.
3. Sproul W.D., Rudnik P.J., Graham M.E. Surf. Coat. Technol. 39/40:1989;355.
4. Mirkarimi B., Barnett S.A., Hubbard K.M., Jervis T.R., Hultman L. J. Mater. Res. 9:1994;1456.
5. Daniels B.D., Nix W.D., Clemens B.M. Thin Solid Films. 253:1994;218.
6. Tomlinson M., Lyon S.B., Hovsepian P.Eh., Münz W.D. Vacuum. 53:1999;117.
7. Punjan P., Navinsek B., Milosev I. Thin Solid Films. 281-282:1996;298.
8. J. Katcki, J. Ratajczak, A. Malag, M. Piskorski, in: A.G. Cullis, A.E. Statton-Bevan (Eds.), Microscopy of Semiconducting Materials IOPP, Bristol, 1995, p. 273.